Correction of characteristics compound longitudinal piezodrive at elastic inertial load for nanorobotics research
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Abstract
The compound longitudinal piezodrive is used in scanning microscopy, adaptive optics of
compound telescope, nanotechnology. For nanorobotics research the compound longitudinal
piezodrive is applied. The characteristics of the compound longitudinal piezodrive are
determined. Its time constant are founded. The parameters of the compound longitudinal
piezodrive for control system with negative feedback on the displacement inductive sensor
or on the piezoaccelerometer are determined.
Keywords
compound longitudinal piezodrive, characteristic, time constant correction
